Subaperture Stitching Interferometry To Detect Non-spherical Optical Components

With the development of the science and technology, more and more aspheric surfaces are widely used for its advantage, but the manufacturing and testing difficulties hinder its development. The annular sub-aperture stitching technique is a new testing method, it extending the dynamic range of the phase measuring interferometer and can realize high-accuracy testing. Its key technology is sub-aperture division, sub-aperture number determining and sub-aperture stitching methods.First, an easy and suitable stitching model been established combined with the optical properties of the aspherical optics after analyzing the aspheric surfaces and the annular sub-aperture stitching technique, the sub-aperture number determining formulas has been derived on this basis. The sub-aperture partition model and edge value that influence the stitching precision and efficiency has been analyzed based on structure numerical example. Second, the serial and parallel stitching model that belongs to stitching algorithm has been discussed, the suitable stitching algorithm model and stitching object function is used to construct the stitching program. Then the approach is proved by applied the annular sub-aperture stitching to simulation of the model. Several kinds of error factors that affect the stitching precision have been analyzed and some solution has been presented. Finally the technical requirements that reform the experiment platform has been proposed.