Precision Chip Thin-film Fixed Resistors

High precision thin-film-chip resistor, with its high stability and strong reliability, is widely applied in many electrical equipments and also in the field of outer space, aerospace, electronic computer and electronic switching computer systems. It is well known as an universal electronic component. Foreign enterprise was able of producing thin-film-chip resistors in industrial amount several years ago, and enterprises from Taiwan started to produce thin-film-chip resistors two years ago. But only a few manufactures in Chinese mainland can produce thin-film-chip resistors. The present study on the thin-film-chip resistors was based and carried out on this special background.In this paper, an approach to manufacture thin-film-chip resistors by dual-ion beam sputtering is introduced. The appropriate conditions can be gained through the progress of annealing, laser trimming, termination and plating. And finally the high precision thin-film-chip resistors could be manufactured.On the purpose of producing high precision thin-film-chip resistors with better properties, two main parts have been studied in the thesis. On the first part, in order to gain the thin film with low temperature coefficient, preparation technologies and thin film performance were studied intensively. There are so many parameters related to thin film performance, such as surface roughness, substrate temperature, sputtering power and time, and temperature of annealing. These parameters were considered in our work and tried through many experiments, and the resistor films with temperature coefficient lower than 10 ppm/℃were finally prepared.On the second part, the topic of high resistance precision was studied. In order to solve the problem, laser trimming method of serpentine cutting and some factors in laser trimming procedure was analyzed, and five steps involved in laser trimming procedure, such as workers, equipments, materials, rules and environments, were strictly controlled. In the end, the thin film chip resistor can meet the requirement of high resistance precision of±0.01%.