Design And Fabrication Of Double Wavelength Laser Protective Infrared Antireflection Filter

In order to protect the military opto-electronic instruments from laser blinding weapons, the high and low refractive index combinations of Si and YbF3, ZnS and YbF3 were selected to design and fabricate laser protective infrared antireflection coatings. On the substrate of multi-spectral ZnS, coatings with laser protective function to 532nm and 1064nm laser while with high transmittance in the 3～5μm spectral band were fabricated, and electron beam and ion assisted deposition technology was used in this process. The deposition process of Si by electron beam was studied, and the deposition process of YbF3 in different materials combination was optimized. The adhesion problem between coatings and substrate was resolved. Devicess of antireflection for detection and protection were both integrated into the coatings, and the structures of opto-electronic instruments for satellite and aeroplane could be simplified. Results of spectrum analysis and environmental test show that all the parameters meet the requirements.