Research On The Measurement System Of The White Light Interference For Depth Of Micro-and Nano-Groove

The measurement,analysis and assessment of surface topography play important roles on quality guarantee.In recently years,with rapid development of the ultra-precision machine,micro electro-mechanical systems(MEMS)and integrated circuit,lots of microcosmic surface structures turns up on the market.“How to reflect the real 3D surface topography of microcosmic surface structures?” has been developed as the hot topic of the area of precise measurement.The machines using for measurement of 3D surface topography now available come largely from abroad,especially the interference microscope of high quality which is almost monopolize by companies from abroad and its price always stays high.So this research paper is highly practical.The purpose of this paper is to manufacture a 3D surface topography measuring system based on the principle of white light interference microscopy,which has the abilities of highly accuracy and highly repeatability.The research details are in the following:1.Manufacturing a system using for the measurement of the groove of micro-and nano-depth.We add white light source,interference microscope component,displacement scanning system and picture capturing system to the microscope and develop a compatible measuring and control system based on the language of VS2010.In order to enhance the measurement efficiency of large size groove,we propose the method to capture picture in different grooves.2.Propose a new method of algorithm which is used for the reconstruction of 3D surface topography.This paper analyses and compares the measurement accuracy and measurement efficiency of the algorithms commonly used for reconstruction of 3D surface topography based on their principles.3.Testing the level of noise,measurement accuracy and repeatability of the system we developed by using step samples of different deep and a standard sample with an ultra-smooth surface.The measurement results indicate that this system has low measurement noise,high measurement accuracy and high repeatability.