Accuracy Analysis And Study On Error Compensation Technology For Aspherical Optics In The Ultra-Precision Grinding Machining

With the continuous improvement for performance requirements of various optical products, it is bound to put forward higher demand in the machining accuracy and surface quality of aspheric components, so how to get aspheric components with higher shape accuracy and more smooth surface becomes an important research contents. In this paper, from improving grinding process and the detection precision of view, a great number of researches focused on the aspects of the measured data processing, precision analysis and error compensation processing.This article, taking parallel grinding and contacting detection forΦ51.5mm convex aspheric reflector as the object of study, presented a method of eliminating special data based on Levin criterion for the centered data, and then the noise was removed through Gaussian filter for dynamic testing data. According to the phenomena of cone boss and swirling Chrysanthemum pattern in the workpiece surface after grinding machining, the influence of the cutter shape of wheel on the contour shape was analyzed. The removal method of tilt error of installation based on ellipse fitting was proposed. Finally, the aspheric surface was tested by means of the null compensator method, and the result that surface precision was PV=0.237λand RMS=0.036λhas confirmed the rationality of processing technic.