Research & Design Of Ultra-precision Measurement And Error Analysis System

With the greatly development of the design and fabrication , it is required more high-accuracy measurement about aspheric Lens with precising measurement instrument, on one hand, should research new testing method to extend the instrument testing range ; On the other hand , should analyze and decrease the measuring errors to enhance accuracyThe paper focuses on the measurement and analysi system of aspheric optics with nano manufacturing precision which the form error under 100 nm and the surface smoothness under 5nm The main researches are shown as follow:1. By analyzing the aspheric lens machining and measuring level at present, we established the machining measuring system of the aspheric lens on the small ultra-precision machining tools SGT100 hardware foundation. First, The paper made an elaboration to the hardware structure, the principle of minitype aspheric profilometer on machining measuring, made a study on the reason of cause error and the correction error method when measuring.2. In order to achieve ultra-precision testing, it is important to establish the measuring error mathematic model and distinguish of error parameter. Aim at the primary system error"Possition error and fringe Error" in the testing system, we established the inverse solution mathematic model. In order to obtain the optical parameter value and error parameter, the paper adopt the Lenverberg-marqurdt and the DFP Multi- dimensional variable scale method united the non-linear least squares method make the measured data curve fitting.3.Based on the theory above, we designed and achieved Ultra-precision Aspheric Lens's measurement and Error analysis system and made a detailed expatiate on design ideology,the principle of algorithm,the strategy of algorithm, the realization of algorithm and also make an introduce to the use of system. At last, the paper developed the software on the VC++ platform.4. By introducing a calculation example to evaluate the reliablity of the system , obtain the surface shape's error PV value and draw the figure error curve of aspheric lens,the paper made an brief introduction about the system working flow and the Algorithm flow of the measuring data processing . The finally result proved that the error analysis algorithm has a quickly convergence speed, stability and satisfy the request of precision of ultra-precision processing.1...