Research On Numerical Control Strategy Ofatmospheric Pressure Plasma Processing

With the development of optical technology,optics used in modern optical systems demand higher accruacy,not only good surface precision and good surface roughness,but also require no subsurface defect.The present widely used computer controlled optical surfacing(CCOS) technique gains much high efficiency and accuracy than traditional manufacture technology,but the contact processing method that it adopts could lead to problems such as subsurface defect etc.Atmospheric pressure plasma processing(APPP) is a method using RF power stimulate reaction gas,generating reactive ions to have chemical reaction with atoms on workpiece surface.This processing method could achieve high precision due to it is based on chemical reaction between atoms and could avoid contact stress because of its non-contact processing method,so it could improve the manufactural quality of the workpiece.By the way ,the removal function in this method is stable,without the problem of abration,and present Gaussian distribution,the center remove quantity is bigger than around,so it is the ideal removal function in deterministic processing.So APPP is suitable for processing high precision optics.The beam removal function of atmospheric pressure plasma processing is the basic of our research,this paper firstly analyzed the effect to removal function of parameters,then fitted out the unit removal function on the basis of experiments and verified the linear variation discipline of the removal rate to the time.To determine dwell time function is the key to use APPP,in this paper how to use Fourier trandform method and linear equations method to calculate dwell time function is analyzed and further analyzed the ill-posed problem of linear equations method,at last the simulation of calculating dwell time is also been done. Due to the unique characteristicic of atmospheric pressure plasma processing,NC code generated by the existing commercial postprocessing solfware can't be used in our atmospheric pressure plasma maching tool,in order to make the NC processing come true ,the research of postprocessing is done combining with the layout of the maching tool and the characteristicic of APPP. The numerical control system to achieve the aim of generating NC code of point stay of the maching tool and a human-computer interaction operating interface are developed by Matlab in this paper. At last the experiment of processing sine surface is done and a good result is got.