The Study On The SM-CO Premanent Magnetic Thin Film Materials

Magnetic thin film materials is an important functional material, widely used inmicroelectronics and information technology, especially in micro-electromechanicalsystems (MEMS). Due to its excellent performance, magnetic thin film materials wasalso the research focus in recent years.Rare earth permanent magnet material thin filmmaterials is the key directions of development.With the developing of technology, therequirements of device miniaturization, function compatible with integration in thisarea, thin film materials which have inherent advantages, can not be met by theordinary bulk materials.Sm-Co permanent magnetic thin film materials are the secondgeneration of rare earth permanent magnetic materials.Although magnetic propertiesare lower than the third generation rare earth permanent magnetic materials Nd-Fe-Bat room temperature, They have high Curie temperature, corrosion resistance andsome other fine features that the third generation rare earth permanent magneticmaterials Nd-Fe-B do not have. Sm-Co permanent magnetic thin film materials areused in some extreme conditions. there are a wide range of applications.The reports of Sm-Co permanent magnet thin films that have been studied ,mainly focus on the thin (about tens of nm) films. In this paper,we study preparationprocess and magnetic properties of thick (about 1μm) film.Cr and W are the bufferand coverlayers of the Sm-Co permanent magnetic thin film materials,respectively.We study the impact of Ar Pressure on the sputtering rate.We alsoinvestigate the impact of different buffer layer on the morphology, microstructure andmagnetic properties of films.