The Magnetron Sputtering Ws <sub> 2 </ Sub>, Ws Preparation And Properties Of <sub> 2 </ Sub>-c Solid Lubrication Film

As a kind of solid lubrication materials, tungsten disulphide (WS2) with perfect tribological properties is very practical in these fields such as aerospace, mechanical manufacturing and micro-electron. But WS2 film will react with oxygen in humid environment forming WO3 that has a high friction coefficient and poor wear behavior. To improve its bearing capacity and tribological behavior, we deposited pure WS2 films and WS2-C composite films using WS2, graphite and pure titanium targets on silicon and Ti6A14V (TC4) alloy substrates by twin-target MF magnetron sputtering and DC magnetron sputtering combined with ion source. Their surface morphology, phase structure, mechanical and tribological properties were investigated via SEM, EDX, Raman spectroscopy, OM, microhardness gauge, scratch tester and ball-on-disk friction/wear test machine. The results showed that:The films depodited by twin-target MF magnetron sputtering was deficient in sulfer element, the S/W atomic ratio of the tungsten disulfide films was more obviously related to the working pressure than the deposition temperature. The films showed the strongest (002) crystal plane at fifty degree, and the diffraction peak decreased as improving the deposition temperature. The micro-hardness of the films was low, but the adhesion force between the substrate and the film was high. The tungsten disulfide films deposited at lower temperatures exhibited much better tribological properties, and the friction coefficient of the films grudurally went up as increasing the deposition temperature.The S/W ratio of the WS2-C composite films was close to the pure films, and the structure was much denser than pure films. The WS2 (002) diffraction peak weakened as increasing the carbon content, but the hardness of WS2-C composite films become much higher because of the presence of carbide phases. The critical load values, Lc2, of the composite films obtained by scratch testing varied from 50N to 70N, and it gradurally decreased with incrementing the carbon content. Compared with the pure films, the anti-wear life of the composite films were much longer, though the friction coefficient was a little higher. The friction coefficient of the pure WS2 film and low carbon content films were observed to decrease continuously with increasing load. It could be concluded that the friction mechanisms of high carbon content films fundamentally differ from those of low carbon content films and pure films.