Studies On Hard Films Of Stainless Steel By Magnetron Sputtering

This paper uses a non-equilibrium magnetic field magnetron sputtering,By changing the sputtering time (2,4,6 hours),Preparation of the TiN,Cr₃C₂ monolayer and TiN/TiC,TiN/Cr₃C₂ composite of different components, Structure and performance in the stainless steel surface. Analysis of the phase composition of thin films by using X-ray diffraction(XRD). Observed in the side of the film morphology,Observed in the side of the film morphology and film composition and trends in stainless steel by scanning electron microscopy (SEM) and its accompanying spectrometer, Study the mechanical properties and film - based adhesion of thin films using HVS-1000 micro-hardness tester. And studying the corrosion resistance of such films using electrochemical polarization curves. Experimental results show that dense film can be prepared by magnetron sputtering, After coating the substrate hardness higher than the base and with increasing sputtering time, the hardness also increased. Different films have different hardness. Comprehensive comparison shows that the maximum hardness of the film from left to right, Cr₃C₂,TiN,TiN/TiC,TiN/Cr₃C₂, By combining the power of the test, We found that different films have different film-substrate binging. The best film-film-binding force is TiN/Cr₃C₂, TiN/Cr₃C₂ composite film has been a new phase by X-ray diffraction and this phase structure also increased the hardness of the film. By using electrochemical polarization curves found that the corrosion resistance after coating is better than the stainless steel substrate itself. Different films have different corrosion resistance. Because these four different surfactant films in sodium chloride solution, Oxidation of metal cation order is Ti²⁺<Cr³⁺<Fe²⁺. Therefore, the best corrosion resistance of these films from left to right is TiN,TiN/Cr₃C₂ ,TiN/TiC ,Cr₃C₂.