7A04Aluminum Alloy Surface Prepared The Hard Film By Magnetron Sputtering

This paper uses the7A04aluminum alloy as the matrix material， usingunbalanced magnetron sputtering process on aluminum alloy for preparing titaniumnitride thin film.Analysis of the phase composition of thin films by using X-ray diffraction(XRD).observed the film surface morphology by scanning electron microscope (SEM).Discusses the hardness and film-substrate adhesion of the sample in differentsputtering process and time by using HVS-10digital Vivtorinox hardness,andexplores the sputtering process for the best mechanical properties.Discusses andanalysis the7A04aluminum alloy in different sputtering time and process corrosionresistance properties by using electrochemical polarization curve. Provides thereference data of7A04aluminum alloy for the more demanding environment servicein the future,and presents a research direction and theoretical basis for improving theproperties of7A04aluminum alloy.Experimental results show that dense titanium nitride film can be prepared bymagnetron sputtering. The substrate hardness after coating higher than the basealuminum alloy.But the matrix hardness would decrease with the prolongation time ifthe film directly fabricated on7A04aluminum alloy by magnetron sputtering. Andexplored the technology which ensure mechanical property: heat treatment before thematrix being sputtered.That is470℃×60min+120℃×3h and sputtered the sample for5hours with the power of210W. Adhesion results shows that film-substrate bingingof being sputtered for2hours、4hours and5hours are better than that of beingsputtered for6hours; A new phase Ti2N has been formed by X-ray diffraction,and thisnew phase structure has also increased the hardness of the film. By usingelectrochemical polarization curves found that, the corrosion resistance of being dualaging treatment is better than that of being treatment by single stage aging. Thecorrosion resistance after coating is all better than the aluminum alloy matrixitself.And the best corrosion resistance is the sample which being sputtered for5hours after heat treatment.