Study On Control Groove Shape Strategy About Ruled Grating By Biconical Circular Graver

Diffraction grating is a precision optical element, widely used in various modern spectral analysis, precision measurement. The mechanically ruled grating in the film by the diamond graver is one unreplaceable manufacture method of diffraction grating. Therefore, it is very necessary to carry out theory research of the mechanically ruled diffraction grating and control technology of the grating groove.According to the course of the mechanically ruled grating by the circular graver, this paper establishes the model of equivalent indentation speed. Based on slip-line field theory, the mathematical model of ruled depth is established.it provides the theory basis for the aluminum membrane evaporation and the graver orientation.Based on measured the aluminum film properties by the indentation test and scratch test, the paper has established the finite element model of ruled grating. The forming process of grating grooved has been simulated by the finite element analysis software Deform-3D, The influence rule of the scoring parameter and graver parameter to the forming process of grating groove are analyzed.Using the orthogonal test method, the scoring parameter and graver parameter have been optimized. The aluminum membrane material mobile rule has been analyzed, Scoring load has obtained. Control strategy has been proposed about the forming process of grating groove.Finally, According to diamond graver wear condition, the orientation of diamond graver is designed, which provides long life graver for big area diffraction grating.