The Development Of A Micro Fabrication Head With A Force Feedback System

With the development of micro nanometer science and technology, micro/nano material is more and more close to the people's life and work. Atomic force microscope use force as its controlled, become one of the most important ways of nano machining, its great success caused more and more attention. But the design of atomic force micro scope with the purpose of measurement, the force of atomic force microscope exerted on the surface of workpiece is very small, and the scope of the processing is limited. According to the problems, we put forward the development of a micro fabrication head with a force feedback system based on force closed loop principle,on the basis of lots of experiments, this thesis conducts the study on the mechanical processing. The concrete content is as follows:Firstly, the machining system of the micro fabrication head was designed and built,include the design of feed system,force measuring device and micro probe,then through the finite element analysis software for the whole structure of statics,temperature and modal analysis.Secondly,a control system of the micro fabrication head was designed,the hardware part of the control system is based on UMAC control unit,the software part can realize functions of automatic approximation process and force servo process control,and the humanized control program interface was design.Finally,through lots of experiments,load-unload curve,force free fall curve and the closed loop system tracking characteristics curve of different materials were obtained. the closed loop mechanical processing experiments on different materials was carry out, and the results were compared with open loop experiments results, analyses the influence factors of the quality of mechanical processing.