Structure Design And Characteristic Study Of Micro-nano Probe System Based On Micro-force Measurement Principle

With the rapid development of MEMS technology, many kinds of micro devices appeared gradually. The present developed detection device of high precision measuring equipment can not measure force magnitude and direction in real time so that the measurement error caused by different magnitude and direction of measurement force and the deformation of probe can’t be corrected in real time. In order to solve this problem, a new contact micro-nano probe was developed by improving and miniaturizing the shear six-axis force sensor.In this paper, the following jobs were done on the design process of the micro-nano probe:The present research states at home and abroad of micro-nano probe and multi-axis force sensor were analyzed; The basic requirement of micro-nano probe and measurement principle were described; Structure design of micro-nano probe was accomplished by improving and miniaturizing the shear six-axis force sensor; The modeling method of the micro-nano probe finite element and static finite element analysis were introduced; In order to reach the mN level probe measurement sensitivity, the structural optimization design was done by using ANSYS software and orthogonal test method. The basic geometry of probe and the location and bridge approach of piezoresistive sensors used to measure force of different directions were determined, which provided the theoretical basis for following processing of probe; The static and dynamic characteristics of micro-nano probe were analyzed by using ANSYS software; The static linear and nonlinear decoupling method of the sensor were described, and the simulation tests were done with static nonlinear decoupling method based on BP neural network; FastICA algorithm of independent component analysis was described, and the simulation tests were done with the dynamic decoupling method based on FastICA algorithm.The simulation and experiment results show that the designed micro-nano probe based on the six-axis force measuring principle has good linearity; The probe measurement sensitivity can reach14.55με/mN in level direction, and can reach10.76με/mN in axis direction through zero compensation; The static coupling ratio of probe can reach less than1%with static non-linear decoupling method based on BP neural network. For micro-nano probe, the dynamic response time is0.4ms; The dynamic sensitivity can reach13.47με/mN in level direction, and can reach10.18με/mN in axis direction; The range of measurement force is from0.2mN to0.8mN. The dynamic coupling of probe can be greatly reduced with dynamic decoupling method based on FastICA; These results provide premises for the project, which lay the foundation for designing high-precision contact micro-nano probe.