Tensile Experiment Equipment For Micro Structure And Assessment On Mechanics Properties Of Micro Structure

With the deep-going research of microelectromechanical system (MEMS), in recent 20 years,a large number of research results appear in the field of new products, new manufacturing technology and new materials. However , with the constantly decrescent scale of the MEMS, some macroscopic features and theorys of no longer suit the study of MEMS, at present the existing macroscopic mechanical properties parameters can not satisfy the structure design requirements of MEMS. Numerous studies show that microstructure and properties of materials can influence its macroscopic mechanical properties. In view of the above problems, this paper designed a set of micro tensile test device that can obtain not only the mechanical properties of materials but also the corresponding micromor-phologies and by this device an tensile experiment of crystal copper wire specimen was made . The specific research contents as follows:Firstly, according to the specific performance requirements of the device, a set of micro tensile test device is designed based on the research situation of existing and comprehensive device,which includes micro displacement institutions, sample holding mechanism, imaging systems and detection system.Secondly, a finite element analysis is made by using the designed micro tensile test device by which can optimize the design of the key parts .It can get the self-vibration frequency of the former 5 stages by modal analyzing micro tensile device.The simulation results show that the micro tensile test device has a good dynamic characteristics and it can achieve high precision driver positioning.Finally, It can be concluded that stress-strain curve of the single crystal copper wire tensile samples can be got from the micro tensile experimental research of it by utilizing the micro tensile test device and the change of microstructure and fracture morphology are analysised during the process.