Dsp-based Wavelength Tuning Interferometer Vibration Technology Research

The wavelength-tuned anti-vibration technology for theΦ600mm wavelength-tuned phase-shifting Fizeau interferometer is researched in this paper. In the active anti-vibration technology, the method using piezoelectric transducer (PZT) as vibration-compensating device is widely used in optical testing. However, it's difficult to satisfy the precise moving requirements while testing the large-aperture optical components. Meanwhile, it has low frequency respond. Therefore, we study on the wavelength-tuned anti-vibration technology basing on the Tunable Diode Laser, which can provide the high frequency respond and achieve better effect of vibration resistance.In theΦ600mm wavelength-tuned phase-shifting Fizeau interferometer, single-point method is used to detect the vibration signal whose product of amplitude and frequency is less than 100λHz. The analysis of vibration signal is described in details. The compensation control system basing on the DSP is designed, whose designing principle is analyzed and the relevant control procedure is compiled. The simulation vibration signal and compensating signal are separately applied on the two modulation mode of the Tunable Diode Laser. And then the interference fringes are stabilized. It achieves good anti-vibration effects.