Realization Of Dual Drive High Precision Two Dimensional Positioning Stage

The long range and high precision positioning technology is critical to the development of biomedical engineering, micro-electromechanical systems. The traditional single drive strategy can't realize both large-stroke and high-precision simultaneously. Therefore, research on long range and high precision positioning system is significant in both theory and application.Macro/micro dual drive technology is an effective strategy to realize long range as well as high precision. This thesis builds macro/micro dual drive two dimensional high precision positioning stage:macro-drive stage fulfills long range, laser sensor measures displacement error of macro-drive stage, and piezoelectric ceramics actuate micro-drive stage to compensate this error to improve positioning precision.The positioning stage system consists of three modules:macro-drive stage, micro-drive stage and coordinating control of macro/micro dual drive stage. Linear step motor is adopted as the key part of macro-drive stage. Theoretical model is established with system identification. Based on this model, a method of predicting displacement error to compensate is proposed when the sampling period is relatively large and simulated result shows that this method can obviously improve positioning precision.A two dimensional micro-drive stage is designed. Flexure hinge is used as transmission mechanism and two parallel fourbar linkages are applied to reduce two dimensional coupling displacement. This micro-drive stage meets requirements of stiffness, strength and natural frequency by analysis of software ANSYS. With stage's simplified model and system identification, dynamic response model of micro-drive stage is built and linear relation between voltage and displacement of piezoelectric ceramic is obtained.Research on macro/micro dual drive two dimensional stage system is carried out:the method of macro/micro coordinating control is discussed, system's hardware design is demonstrated and the performance of micro-drive stage and measuring equipment is tested. Experiment of macro/micro long range dual drive real time compensation is performed. It confirms that dual drive technology can effectively resolve conflict between long range and high precision.