Solid State Chemistry. Mems Micro The Advancing Array Design, Production, And Its Performance

With the development of micro-nano satellite technology, MEMS solid propellant thruster array, which can provide small thrust and impulse, has become the hot spot of research pursued. A 6X6 MEMS solid propellant thruster array was fabricated, with 36/cm2 unit integration. The ignition and micro-impulse tests were successfully carried out. The main contents of the paper are as follows:(1) The classical sandwich structure was used in the design of micro thruster array. An ignition bridge was fabricated on the jet nozzle array layer, which can improve the performance of the device;(2) A TMAH (tetramethyl ammonium hydroxide) solution was studied, an optimized "two-step" etching process was obtained, which has been successfully used to fabricate a deep silicon nozzle with depth of 485μm, surface roughness is 0.278μm, and average etching rate is 1.01μm/min;(3) Taking the rupture pressure and bonding strength into account, the strength of the silicon film was calculated. And a simple and effective silicon film thickness precision control technology was presented;(4) A U-shaped Ni/Cr alloy ignition bridge was designed and fabricated, which has a complete shape and stable resistance;(5) Fire performance of the ignition bridge was studied by using a CCD and infrared imaging. Results show that:when the voltage is 10V, the bridge film temperature rise slowly, and not fusing; while on 30V, the bridge film temperature rose extremely rapid, just in 40ms the temperature can exceed over 300℃, higher than the ignition point of the propellant;(6) A "three-dimensional" feedthrough was successfully designed and prepared. Compared with the traditional feedthrough, it has more advantages such as simple in design, scalable, and easy in control;(7) The nozzle layer and chamber layer were bonded together by conductive paste, which can realize good electric conduction and promise sufficient sealing intensity. Improving the three-dimensional printing rapid prototyping to achieve a high quality, high efficiency micro charge;(8) Unit ignition and micro-impulse were tested by using 30V constant voltage to excite. The measured average ignition delay time is less than 50ms, and 36 units tested are all reliably fired, the success rate is 100%; Improved a micro-impulse test platform, and the measured micro-impulse average is 2.55744×10-4 N·s.