CNTs/NiO/Ni/Si-MCP Three-dimensional Structure For Hybrid Supercapacitor

Recently, with the high-speed development of electronic science and information technology, constantly updating and optimization of process conditions, the electronic devices, especially those used in portable electronic devices such as laptop, mobile phones, become miniaturization with high performance. As the basis of micro-devices, the selection, preparation and application of the microstructure materials have become the focus of the interdisciplinary field of electronics, physics, chemistry, biology, material and etc. Compared with the traditional two-dimensional (2D) structural materials, three-dimensional(3D) materials which have unique physical and chemical properties, have attracted widespread attention. Due to its advantages, silicon based3D material has become an ideal material to fabricate the micro-supercapacitor.The first chapter introduces the research background, including the MEMS technology, silicon microchannel, supercapacitor. And it also states the main content of the whole research.In chapter two, the principle and process of preparation of silicon microchannel plate as the basic architecture of the experimental are introduced.Chapter three is the core section. The choice of materials, as well as the application of carbon nanotubes is introduced. It also reports the preparation of carbon nanotubes (CNTs) films on NiO/Ni/Si-silicon microchannel plates for three-dimensional hybrid supercapacitors. The silicon MCPs are prepared by electrochemical etching and the NiO/Ni/Si-MCP structure is obtained by baking after deposition a nickel film on the sidewall of the silicon MCP by electroless deposition. The thin films of CNTs are fabricated on the structure by electrophoretic deposition (EPD). The materials are characterized by X-ray diffractiom(XRD) and field-emission scanning electron microscopy (FE-SEM). It is found that all the areas on the NiO/Ni/Si-MCP structure are homogeneously covered by carbon nanotubes.In chapter four, several major standards that measure the supercapacitor performance are described. The electrochemical properties of the3D structure are investigated by cyclic voltammetry (CV), chronopotentiometry, and cycle measurements. The structure exhibits excellent capacitive behavior with a specific capacitance of4.1F·cm-2, much higher than NiO/Ni/Si-MCP structure. After2000cycles, capacitance loss of7.3%indicated the great stability of the structure.Chapter five summarizes the work of the full text, and prospects the3D supercapacitor.