Preparation And High-frequency Magnetic Of Fe-based Transition Metal Alloy Films

Due to the increasing development of information technology and digitalization of electronic equipment, soft magnetic materials have been used in related field. While at the same time, the requirements for their performance become more demanding. Recently, the foundation of the electronic components was put forward higher requirements in condition that it is obvious that the development of electronic components towards the direction of the miniaturization, high-frequency and integrated materials has became a vital trend. To fulfill the requirements of the components of relevant magnetic films, the soft magnetic thin films with high permeability and high frequency has become the latest hot area of research of magnetic materials.In this dissertation, we deposited FeNi, FeCo, FeNi-FeCo and FeCo-SiO2films by RF magnetron sputtering on Si(111) and conductive glass. The micro structure, static magnetic properties and high frequency characteristics were studied by X-ray diffraction (XRD), surface profilometer, scanning electron microscopy, vibrating sample magnetommeter (VSM). The contents and results are as follows:1. Studied the relationship between the angle of the oblique sputtering and the anisotropy, the resonanct frequency of FeNi, FeCo, FeNi-FeCo and FeCo-SiO2films. It is tilted columnar growth to the film of oblique sputtering. Discussed the oblique sputtering of the film in-plane uniaxial anisotropy of the source may be the shape anisotropy.2. With the increase of the tilt angle, the anisotropy field and easy axis coercivity increase, the hard axis coercivity is about OOe, and the resonance frequency can adjust from2.7GHz to3.8GHz for FeNi film.3. For FeCo film, with the increase of the tilt angle, the anisotropy field and easy axis coercivity increase, the hard axis coercivity is a little large.4. For FeNi-FeCo film, the easy axis coercivity of FeNi-FeCo film prepared by co-sputtering is less than the easy axis coercivity of FeNi film, with the increase of the tilt angle, the anisotropy field increase. While the easy axis coercivity of FeNi-FeCo film prepared by alternately sputtered is larger than the easy axis coercivity of FeNi film, it is not linear for the anisotropy field.5. It has no obvious relationship between resonance frequency and angle of inclination of FeCo-SiO2film.6. Crossed with a laser on a conductive glass, and then to deposit thin film can be incluced to come forward within the uniaxial anistropy, oblique sputtering and laser crossed when combined, the resonance frequency of FeNi film did not increase, while there is no emergence of resonance in FeCo film.