Superconductor Flux Qubit Manufacture Process By Electron Beam Evaporation And Circuit Design

Quantum information science based on Quantum computers and long-distance quantum communication is a research frontier for information science. Moore’s Law has almost put traditional computer industry to dead end. As a new type of computing system, Quantum computing is the future. Superconducting Josephson junction system is one of the most potential qubit systems. It is based on superconducting macroscopic quantum coherence effects. This thesis made detailed works on manufacture process of superconducting qubits by electron beam evaporation and design on flux qubit circuit structure and parameters.The main research work and achievements are:1) Manufacture process by electron beam evaporationFor a newly designed system of Multi-source electron beam evaporation equipment, we made instrument operation and commissioning, collated and summarized the instrument commissioning and trial evaporation data, scoped the best evaporation conditions and parameters, analyzed several major issues such as the overflow of Al materials and poor heat Dissipation of Crucible etc. and proposed solutions.2) Design on flux qubit circuit structureWe expounded the principle of the core components of the superconducting flux qubit circuit: RF-SQUID, DC-SQUID and bias circuits, found the parameters that affect its quantum state and the interaction between components.3) Design on flux qubit circuit parameters Focused on two important parameters of the RF-SQUID potential energy function:Φx and βL, made Matlab simulation to the relationship between the number of energy levels and this two parameters according to the relationship between the number of energy levels and the relative potential barrier height of RF-SQUID. Made Finalization of the superconducting flux qubit circuit lithography mask layout.Superconductor flux qubit manufacture process by electron beam evaporation and circuit design provided a solid experimental basis for the development of superconducting qubits.