Study On Spectrum Character Of Ar+in The Pulse-modulated Magnetization Capacitive Coupling RF Discharge

Radio Frequency capacitive coupling discharge device is one of the most important devices to produce low temperature plasma which was developed in the early1970s, it is widely used in various kinds of industrial areas especially microelectronics for it could be used to produce an abundance of uniform distribution low temperature plasma in a large areas. Yet, its further application is restricted due to the fact that the plasma’s density and energy are difficult to control. In order to overcome these defects and make it serve the industrial production better, many researchers have began to pay attention to the pulse modulation power and magnetic field in recent years, and the results have constantly shown that the plasma parameters can be more easily and flexibly controlled if we use pulse modulation RF power and magnetic field in the process of capacitive coupling discharge.Based on the above reasons, we mainly investigate Ar plasma spectral characteristics from the following tow aspects employing the pulse modulation RF capacitive coupling discharge device which carries with permanent magnetic field and Princeton Action2500i Emission Spectrometer:(i) we discuss the changing regularities about electron excitation temperature kTe and Ar+357.6nm spectrum relative intensity with air pressure P, RF power W, pulse modulation frequency f, pulse modulation duty cycle η and magnetic field intensity B when permanent magnets are placed on both sides of the discharge chamber;(ii) we also discuss the same changing regularities when permanent magnets are placed on the top and bottom of the discharge chamber. At last, we contrast the conclusion of the first circumstances with the second. In the experimental process, electron excitation temperature is calculated through the Boltzmann slope, and we chose five emission spectral lines whose wave lengths are420.06nm,687.13nm,714.70nm,750.39nm and772.38nm respectively. We demarcate Ar+357.6nm to investigate the change rules of relative intensity.According to the experimental study, we find that electron excitation temperature and Ar+spectrum relative intensity present different change regularities with external condition, and the experiment results indicate that the existence of pulse modulation and magnetic field have a great influence on electron excitation temperature and spectrum relative strength.