Development Of Micro-tool Electrode Online Processing Equipment And Processing Research

Microfabrication has wide application in many areas of precision molds, aerospace, precision instruments, bio-medical etc. There are many developed microfabrication methods, such as micro-EDM, micro electrochemical machining, micro ultrasonic machining, etc. which require the use of micro-electrode to achieve the processing of the micro-structure. For example, the processing of the axis of the electrode with a simple shape of fine porous slot and tiny three-dimensional cavity, using the array of tiny electrodes on the group of holes and complex cavity processing. In order to ensure the scale and precision of the microfabrication, it has corresponding requirements on the use of the tool electrode size, shape, position accuracy and surface quality. In addition, it is also critical to minimize the adverse effects of the tool electrode position accuracy of the micro-machining, so you need online, and prepare to avoid the duplication of the electrode due to the second fixture positioning errors and fixture errors. Precision manufacturing methods to produce a diameter as small as a few microns of the micro-electrode, such as turning, milling, grinding method, LIGA, but they generally can not achieve online preparation tool electrode, which makes it difficult to match follow-up fine process. Whether micro-electrode can be achieved online preparation or not has become the premise of many microfabrication methods and one of the keys. Therefore, it has far-reaching significance to independently develop a dedicated micro-tool electrode preparation deviceFine line electrode preparation methods include BEDG (block electrode discharge grinding) method, WEDG (wire electrode discharge grinding) method, electrochemical corrosion, EEDG (edge electrode EDM grinding method) act, which are EDM methods. Through the tool electrode preparation techniques are reviewed, and then determine the combination of WEDG and BEDG as the program.The paper discussed the development of micro-tool electrode preparation device in detail, including turntable diameter700mm, precision displacement units, granite countertops and columns, on the basis of these overall structural design, micro-electrode design of processing equipment was carried out, including the level of feed mechanism, the vertical feed mechanism, the rotating spindle, the lead electrical device, observation devices.Requirements for the processing of micro-EDM, the control systems were developed for WEDG and BEDG. It is on the basis of the equipment and control systems that to study the mechanism of WEDG and BEDG, and to do related technology test.In the micro-tool electrode processing experiments, compared to the experiment results under three different feeding method, tangential feed has the advantage of processing, then use online processing obtain good electrode, perforated experiments on stainless steel plate and achieved the desired results, which verifies the equipment with high precision and stability.