The Development And Research Of Cutting Fluid Product

Good suspension can reduce the wafer surface damage stress, thepreparation of the suspension is one of the key factors in processing super smoothsilicon wafer,its performance determine the final silicon wafer surface qualitydirectly.Therefore,a good performance of cutting fluid is very necessary.In order tosolve the problem of settlement in the suspension of silicon carbide,this paper studythe characteristics of cutting fluid,developed new cutting fluid improve the stabilityof the suspension of silicon carbide.Many factors influence the preparation of suspension system,this dissertationmainly studies the effect of PH value,the kind and content of dispersant and viscosityon the dispersionstability of the suspension system.By relatively the drop height saidthe stand or fall of dispersion. Through multiple settlement experiments,reach aconclusion of appropriate value of PH is7and appropriate range of viscosity is40~80mPa·s.Compared the distribution effect of SD efficient dispersant and theoriginal used dispersant dispersant A,then ascertain the optimum species is SDefficient dispersant,and the best additives of dispersants is1wt%.This paper from thestability of the suspension of silicon carbide developed new cutting fluid.Viscosity is the important transfer properties of fluid, is necessary based data inengineering design. This paper admeasured glycerin, polyethylene glycol400(PEG400), glycol three kinds of organic materials which may be made into cuttingfluid respectively by NDJ-1rotating viscometer in303.2K, the three organicmaterials were mixed with water,then admeasured the viscosity changes of binaryorganic mixed solution,and get the viscosity correlational equation of half experience.The viscosity relational equation of glycerin-water binary mixture islnη12=-3.6363exp(x1/-5.7979)+4.0984(x1is the moore scores of PEG400).The three viscosity correlational equations of half experience correlated to the measured datas are0.9993.0.9981.0.9987,the correlation of the high accuracy.Because glycerin viscosity is bigger, so that the hydrogen bond associating exist its molecules.accordingly this,this paper get the the viscosity model which based on the development of associating effect.Through correlated to the measured datas,get the relational equation of glycerin-water solution in303.2K: lnη12=φ1ln{0.0457+11.1245*[0.0081exp(φ1/0.0043)+2.7191]}-0.2223φ2,φ1and φ2i s the volume scores of glycerin and water respectively.Compared with the experimental value,get the average relative error is4.28%.And get the relational equation of glycol-water solution in303.2K: lnη12=φ1ln{0.0457+7.4981*[0.4087exp(φ1/0.7742)+0.4199]}-0.2223φ2,φ1and φ2is the volume scores of glycol and water respectively.Compared with the experimental value,get the average relative error is0.77%...