The Research On The Processing Technology Of The Silicon Lens In The Ir Tracking System

In recent years, with the rapid development of the optical field, the most widely used silicon as infrared optical materials, infrared optical system is becoming increasingly important. The paper makes a Φ24mm the silicon lens as an example, on the base of the CCOS technology and the Preston theory. Solve the problem of the single-crystal silicon surface polish and difficult control of the center deviation, and achieve the mass production by repeatedly comparative experimental studying, testing analysis, proposing the efficient and fast process and designing a special fixture.After the testing by prof ilometer and Zygo detector, the single-crystal silicon aspheric surface figure can get0.2μm, the surface polish can achieve above the grade III and the deviation of the center is less than1μm.All the parameters are to meet the requirements of an infrared tracking system.