Investigation Of ZnO-TiO₂System Micriwave Dielectric Ceramics And Low Temperature Sintering

In this paper, we adopt the traditional functional ceramics method to do ZnO-TiO2microwave dielectric ceramic system, and adopt some analytical testing methods, such as thermo-gravimetric/differential thermal analyze (TG-DTA), X-ray diffraction (XRD), scanning electron microscopy (SEM) and microwave dielectric performance testing methods, to study the microwave dielectric ceramic phase and dielectric performance impact of ZnO-TiO2by different titanium-zinc ratio and partial substitution of anatase to rutile; and by adding different low melting point oxides and low softening point glass. Through the formula of adding2Wt%-6Wt%Zn0-B203-SiO2glass Zn[TixTi(1-x)1.1O3, and by the business process and production validation, the results of this paper,"Low Temperature Sintering ZnO-TiO2microwave dielectric ceramic system" is consistent with LTCC technology requirements. By using "low-temperature sintering of ZnO-TiO2microwave dielectric ceramic system" results of this study, we had developed and mass production of a variety of LTCC multilayer chip devices by combining with a full set of products design, simulation and LTCC process. The major findings and understanding obtained during the test are as follows:(1)The crystal phase synthesis of ZnO-TiO2system is sensitive to the types of raw materials, especially TiO2, when the ratio of titanium to zinc is1.1:1, the synthetic quantity of ZnTiO3phase is the maximum.(2) When pre-burning powder, replacing the Rui titanium TiO2by the rutile TiO2can effectively raise the hot stability of ZnTiO3and raise the ZnTiO3content in the ZnO-TiO2ceramic;When replace quantity as X=0.5, the contents of ZnTiO3is maximum.(3)Adding Zn0-B203-SiO2(ZBS) glass in ZnO-TiO2ceramics restrains the decomposition of ZnTiO3, and the quantity of ZnTiO3is not affected by the additive amount of ZBS. Add6wt%ZSB glass sample, when testing frequency is high than a3GHz under the sintering condition of900℃heat preservations for2hours, we get the dielectric performance of:εγ=26.8, Qf=21700GHz, τf=-13ppm/℃.(4) Zn[TixTi(1-x)]1.1O3(rutileTiO2, X=0.375) with2Wt%-6Wt%Zn0-B2O3-SiO2glass accords with the demands of LTCC technical requirement. Using this ceramic material, the company has designed and mass production for LTCC multilayer chip filter, Balun, antenna, and Balun filter etc.