Dynamics Research On LUSM Motion Platform Based On The Design Of Flexure Hinge

The research project derived from the National Key Basic Research Development Program (973Program)(2011CB707602); NSFC-Guangdong Joint Foundation Key Project (U0934004); theNational Natural Science Foundation (50975136).The precision motion platform occupies a vital position in the field of advanced industrialproduction and scientific research, whose technical levels of the positioning accuracy are closelyrelated to the high-precision machining and precision measurement. In some key fields of technologyconcerning with national economy and defense industry, the development of domestic precisionpositioning technology is backward, enslaved to the foreign high-tech introduction.The form of the mechanical structure of the precision motion platform is varied with wide field ofapplication. This essay introduces and designs a new precision motion platform structure, which ishighly innovative in both key technology fields, namely, structure technology and driving technology.Particularly in terms of the design of structure technology, flexure hinge was introduced, whichapplies its prominent advantages in the field of precision positioning technology to this platform,making the platform have a new breakthrough in the design of motion transmission.This essay proposed a design of a parallel rigid-flexible mixture precision motion platform(hereinafter referred to as the parallel motion platform), and had a theoretical model analysis on it instatics and dynamics, each getting the kinematic relations expression and vibration differentialequations of the platform system. It establishes a parallel kinetic model motion platform based onANSYS and Pro/E carried out dynamics simulation analysis by the ADAMS.In addition, this essay introduces application of linear ultrasonic motor in precision motionplatform in driving technology, and analyzes the Stepping characteristic and Stepping positioningaccuracy of single degree of freedom platform based on the design of linear ultrasonic motor from thepoint of the experiment, providing the basis for optimization for the structural design of the parallelmotion platform.