The Research Of Composite Range Micro-accelerometer Temperature Compensation

In recent years, with the high-tech industrialization development of our national defense,industrial, environmental protection and automatic control，the development of Siliconmicro-accelerometer is in a important position because of its prominent features such as smallsize, high reliability, ease to be integrated and can be producted by large-scale mass,. Itsdevelopment plays a vital role in enhancing the technology of military and civilian fields inthe twenty-first century. The accuracy of Silicon micro-accelerometer is largely affected bytemperature, so the technology of silicon micro-accelerometer temperature compensation hasbecome an important issue in the current domestic inertia technology research areas. Thispaper used the method of a combination of compensation of hardware circuit and softwarealgorithms on the base of our complex range micro accelerometer after studying the varietytechnologies of temperature compensation at home and abroad. Then putting the emphases onthe zero drift and sensitivity drift of its temperature ,realized the accurate measurement ofsilicon micro-accelerometer .The main content of this paper is divided into the following foursteps:1）Analysised the temperature drift of the accelerometer, and proposed a compensationmethod which has a combination of hardware circuitry and software algorithms ,then it canacquire the voltage signal more accurately , make the voltage signal hardly impacted by thechange of outside world and has a good dynamic response, software and hardware resolve theproblems aroused from ambient temperature together.2）Design system is a based on DSP hardware compensation circuit ,which include thedesign of the bridge balance circuit, the acceleration signal acquisition circuit , thetemperature signal acquisition circuit and peripheral circuit.3）Designed the software program, including the main program, the acceleration signal acquisition process, the temperature signal acquisition, A / D converter and RS232 serialcommunication program.4）Designed the control algorithm. Improved the character of the system by combinationthe methods of least squares algorithm and Newton interpolation.Analysised the design ideas of temperature compensation circuit, thoroughly analysis thecompensation idea on the base of thinking about the characteristics of the accelerometer,analysised the reason to be able to achieve high-precision compensation and designed thecompensation circuit module, and successfully developed a software compensation system,the paper introduces the hardware circuit and the core codes of software.The experimental results show that the method we used has effectively compensated thetemperature drift of the complex range micro accelerometer with feasibility and reliability.