Study On The System For Calibrating3D Micro Tactile Probes

With the expanding of the dimension and the growing complexity ofthe structure, the demands cannot be met the current micro-nano measuringtechnique. Thus, it becomes more important to develop new measuringsystems and methods. A micro tactile probe and the corresponding testing andcalibrating system were developed based on the nano measuring machine(NMM) which was in the laboratory of this project group.The main work of this paper is as follows:1） Establish the structural features of MEMS capacity sensor, which was usedon the probe as a sensing unit, by performance simulation and principleanalysis. And then position and paste the stylus to package as a probe.2）Design a calibrating system which is consisted of a probe, a calibratingdevice and a processing system.3）Design a device which can switch the measuring signal and display the stateof the probes real-time to achieve the performance comparison with otherprobes.4）Operate calibrated experiments to test the performance of the probe as theresolution, linearity and stability.5）Find the limitations by means of analyzing and comparing with other probes.And then propose some corresponding improvements and measures.