Research On Measurement And Traceability Of The Nano Standard Template

According to the requirements for ultra precision measurements andtraceability at micro and nano scale in field of micro machining and ultra precisionmachining, the experiment environment, measuring system, measuring methods andthe traceability of measuring system at nano scale are studied. As the results, themeasurements of high precision and large range about nano standard templates areachieved. This thesis contains research works as below:Firstly, nano measuring system is studied and a white light interference sensorbased on the NMM is developed, the measuring method of view scanning is achievedand themeasuring range of measurement system is expanded to5mm threshold ofNMM. the white light interference sensor based on the NMM is demarcated by thestandard template of large size, and the measurement result illustrates the measuringrange of the nano measuring system is improved.Secondly, vertical and horizontal nano standard templates are measuredprecisely based on several sensors of the NMM. The method of the orthogonal angleof the pitch templates is indicated. It is tested and verified based on the measurementresult of pitch templates, and the measurement results illastrate the method is valid.Thirdly, the limitation of optical measurement method is studied about the steptemplate with the different surface character. Influence of optical method in this typeof structure is eliminated through improving technics and accuracy result is obtained.Compared with the laser focus measuring method, the experimental results verifymeasuring method of white light interference is more suitable for such templates.Fourthly, the traceability of the nano measuring system is studied. The nanomeasurement system environment factors and the design of measurementenvironment are studied and discussed. Beat frequency experiment of the laserinterferometer of the NMM is finished according to transmission of the typicaltraceability system. By comparing the results between different labs, the overallperformance and the traceability of the nano measuring system are researched.