Software Development And System Testing For A Micro-nano-coornidate Measuring Machine

High Concern has been attracted by Micro-nano 3D measurement in recently years.More micro-size parts are produced because of the rapid ultra precision machining technologies development,such as precision optics device,which require the accuracy of measuring equipment reaching at nano level.Based on the current environment,the concept of Micro-nano-CMM with micro and nano-level has been proposed.Under the program module of original CMM,the main improvements are listed as below:1.The software algorithms for motion control was not optimized well so some errors has been occurred in the machine movement.It had some impact on the stability of the software.The phenomenon had a serious limitation to our normal experiments.We should consider the software stability as our primary task.And now the positioning control is based on the conventional PID strategy.The reasonable PID parameters are selected to control the AB2 drivers,which make CMM reach micro and nanoscale positioning at last.2.The function of the comparison of displacements is added in the program between CMM and SIOS laser interferometer through line fitting to eliminate positioning errors and improve measurement accuracy.And the measurement functions of program were simplified before this,which only contained the step and flatness error in the Z axis.The measurement functions are further more developed by adding depth and flatness error in the X axis and Y axis.3.The automatic measuring program is designed to improve measuring efficiency.The results of flatness error and step and depth can be achieved in a single experiment with a proper path.4.Finally,the measuring report program for CMM is developed which can output experimental documents.Textual description,experimental data and results are included,which can be used and checked by the laboratory worker.