| After a brief review about the research progress of high acceleration and highprecision XY positioning stage for wire bonders at home and abroad, the workincluding the dynamic design, modeling and analysis of a XY stage directly driven byvoice coil actuator has been accomplished. By using the combination of simulationand experiment, force compensation controllers are then designed and implemented.To solve the structure and dynamic characteristics problem of the decouplingmechanism, simplified model was built and a method for dynamic design waspresented. Newton method was used to build the simplified model and the matchinglaw of preloaded spring was revealed. Based on finite element, multi-body dynamicsand control theory, rigid-flexible and electromechanical model of the stage wasestablished using related software. By co-simulation, the influence of the bearing,hinge and preloaded spring on dynamic behavior of XY stage was studied. Thismethod can apply to model a complex system and guide the prototype fabrication.The bond graph approach was used to perform the global coupling dynamicmodeling of the XY stage with bolted connection, elastic connection and friction.Based on open-loop model, the influence of the equivalent stiffness and damping ofthe bolted and elastic connections on the system response was analyzed. The bondgraph model of the XY stage was to be used to study control strategies.Force compensation controllers were proposed for the direct-drive form of thestage. The force equation of the voice coil actuator was built to change all externalforces to the commanding signal. The principle of the current loop of the amplifierwas revealed and used to convert external forces to input command. Using simulationand experiment methods, the proposed controllers were applied to actual motionsystem to verify its effectiveness. The results revealed good tracking performance ofmultiple trajectories and close match between design requirements and actualperformance. |
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