Design And Motion Control Of A Two Degrees Of Freedom Micro Positioning Stage With Large Workspace

Micro positioning stage is the core functional component of micro/nano processing and equipment test. In order to design a micro positioning stage with large workspace and high resolution, the paper deals with the key issues related to structural stiffness, natural frequency, movement characteristics of micro positioning stage by flexibility matrix method, Lagrange's equations and finite element analysis. The following research achievements have been acquired.A two degrees of freedom flexure-based micro positioning stage have been design, which is driven by voice coil motor. The micro positioning stage is composed of upper stage and lower stage, they are connected by bolts. The micro positioning stage has advantages including large workspace, high load-capability, completely decoupled.The stiffness and natural frequency of simplified micro positioning stage model have been analyzed by flexibility matrix method, Lagrange's equations, respectively, which lays the foundation for parameters design of structure. Based on finite element analysis, the paper has systematically studied the statics characteristics, coupling displacement errors, natural frequency, dynamics characteristics.Based on theoretical analysis above, the prototype and corresponding experiments have been conducted including response characteristic analysis, calibration of workspace and resolution. The micro positioning stage has a fast response and good stability, good decoupling effect, workspace for millimeter, resolution of micron level. Using PI controller, the micro positioning stage has better performances.