Finite Element Analysis To The Main Parts Of Scroll Vacuum Pump For Radioactive Gas

With the rapid development of science and technology, the needs of fully sealed oil-free scroll vacuum pumps become increasingly urgent. They are widely used in the transmission and storage of nuclear and high purity gases; the recovery of the gas with production of semiconductor electronic devices; the oil-free cleaning system of electronics industry. Inside the fully sealed oil-free scroll vacuum pump, the bellows seal is essential, if the seal is not good, the pump can not reach high vacuum level, can not meet the actual project. Once these radioactive gas leak, not only cause security risk to production, but also pollute the environment, even cause serious accident.When the fully sealed oil-free scroll vacuum pump works, the vibration of bellows by eccentric structure. The main components of vibration to bearing a long-period alternating load, all kinds of injury and damage, like fatigue failure, will become contributing factors to affect its capacity and life of equipment.According to actual needs,conducted a study on the bellows of scroll vacuum pump of pulling out radioactive gas, the subject:First, the inherent frequencies and the shapes of the vibration were obtained by the modal analysis of the bellows with ANSYS, which are the foundation of the further dynamical analysis. Also, the analog of the bellows drew the graph between the value of stress, displacement and frequencies, which are the foundation of the further dynamical analysis. Second,the graph between the values of response (displacement) and frequencies was obtained by the harmonic response analysis, which indicated that the results of modal analysis are reliable. Last, in this work, ANSYS Workbench software and S-N curve are used with the mean stress correction methods to analyze the fatigue life of bellows.