Design Of Magnetic Force Driving Dual-chamber Micropump And The Detection And Control System

Micro-fluidic chips integrate chemic analysis processes of sample extraction, separation, analysis and processing in one chip of square centimeter magnitude, and its micro-scale, subtlety and automaticity make it widely used in chemical industry, medical treatment, aerospace and many other fields. Micropump is the fluid power source of micro-fluidic chip, and its performance directly affects working state of micro-fluidic chip, so research and fabrication of micropump becomes an important part in micro-fluidic chip domain.This thesis makes valveless micropump be the study object, which has simple structure and steady performance. Aimed at developing backpressure resistibility, a structure of series dual-chamber valveless micropump driven by magnetic force was designed. Fluidic simulation was done by ANSYS software to get optimal structural parameter of diffuser/nozzle and single chamber micropump, and relationship of flow rate and size parameter was gained. After that, magnetic simulation of series magnetic force drive was done in ANSYS, and drive structure with little cross effect of magnetic force between two series chambers was gotten. Micropump with different shapes and scales were fabricated by micro Mechanical technique. Pump membrane was fabricated by polydimethylsiloxane(PDMS). And magnetic force drive platform was designed and made out with polymethylmethacrylate (PMMA) material. With DC motor and NdFeB permanent magnets, entity of magnetic force driving and series dual chamber micropump was built up. Flow rate detection and control system cored with MSP430chip was designed, which contented motor drive and control circuit, motor rotation rate detecting circuit, flow rate detecting circuit and so on.Experiment data of driving experiments showed that flow rate first increased then decreased versus the rise of drive frequency, and that a peak flow rate of1.5mL/min showed up when drive frequency was about20Hz, and that micropump closed up when backpressure became170mmH2O. Compared with single-chamber micropump, series dual-chamber micropump’s flow rate increased by80%.