Study Of Parallel Double Chambers Valveless Micropump Based On Saw-tooth Channel

Microfluidic system with integrated high performance stability and powerful features has been widely used in the electronic, mechanical, chemical, medical, aerospace and household items are. The implementation components of microfluidic system include micropumps, micro-valves, micro-flow channel and a variety of physical sensors. Micropump powers the movement of fluid within the system, and its role is as the heart in the blood circulation system, so its development has been the concern of scientists from various countries. Valveless micropump based on diffuse/nozzle principle have advantage of simple structure, easy integration, stable performance, easy to plug and so on, and has become a valveless micropump research focus.This double chamber parallel valveless micropump is based on saw-tooth channel. By ANSYS finite element analysis software, the saw-tooth diffuse/nozzle pipe flow field and performance of piezoelectric bimorph were simulated, and analysis results showed that:by increasing saw-tooth in the diffuse/nozzle pipe, the diffuse/nozzle effect was enhanced, and under the same parameters the steady flow of saw-tooth diffuse/nozzle increased about 30% as the smooth one; With the diffuse/nozzle pipe length, minimum width and expansion angle increasing, the steady-state flow was no longer monotonic, and there was a maximum point; According to the simulation optimize results of the saw-tooth channel structure, silicon and glass substrate saw-tooth diffuse/nozzle pipe were produced by MEMS technology. Easier processing of PMMA was selected as pump chamber materials, and with different structural parameters of saw-tooth single-chamber and double chambers valveless micro-pump would be fabricated.In order to more accurately test the performance of micropumps, the micro-flow sensor test system based FPGA was designed. Test results showed that:the flow rate of saw-tooth diffuse/nozzle micropump can increase by 30% in the same drive capability; The flow rate of double chambers micropump increased largely comparing with single chamber micropump flow, but because of the drive equipment had not yet reached ideal state, the flow rate of double chambers micropump was less twice than single chamber micropump.