Research On Electro-acoustic Characteristics Based On ZnO Film

ZnO is a classic Ⅱ-Ⅵ semiconductor, It has been investigated extensively because ofits interesting electrical, optical and piezoelectric properties making suitable for manyapplications such as solar cell window,transpatent conductive films,bulk acoustic wavedevices and light emitting diode(LED). We successfully fabricated zinc oxide(ZnO) basedfilm bulk acoustic resonator by magnetron sputtering method. This paper study thePiezoelectric properties and Acousto-optical properties of ZnO and LiNbO3.The background of transient thermoelastic analysis is introduced in this paper, and theresearch and simulation of P properties of ZnO is did by MATLAB using transientthemoelastic analysis, Comparation between analysis and simulation provides a new way toanalyze P film, and sets up a reference of parameters for subsequent experiments. This papersystematically studies Theory of Acousto-optical (AO) effect, shows definitions of AOeffect and its diffraction efficiency, introduces methods to classify the AO interactionclassified method of AO interaction，especially analyzes Acousto-optic technology of Braggdiffraction.ZnO films were grown on LiNbO3substrates by magnetron sputtering, which make thismaterial can produce ultrasonic wave and Acousto-optical (AO) effect.In this paper, effectsof different conditions on film structure and properties during magnetron sputter plating arestudied, and the resistance characteristics and surface acoustic characteristics of ZnO filmsare tested. And this paper introduce a new theory to analysis the Acousto-optical (AO) effect,which can find out the Acoustic frequency that cause the Acousto-optic effct of Braggdiffraction.