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Experimental Study Of The Micro-electro Forming Combined Effects Of The Ultrasonic And Magnetic Fields

Posted on:2014-09-07Degree:MasterType:Thesis
Country:ChinaCandidate:B MiaoFull Text:PDF
GTID:2251330401963858Subject:Mechanical Manufacturing and Automation
Abstract/Summary:PDF Full Text Request
With the rapid development of MEMS technology and products, micro-electroformingtechnology as one of the MEMS technology, it has been extensive attention by scholars fromvarious countries because of its unique advantages and good prospects.In this paper, the impact of ultrasonic power, magnetic field strength, the cathode currentdensity, the pulse duty cycle and other parameters on electroplating layer surface morphology,microhardness and organizations texture have been detailed studied on the basis of the microelectroforming experiments in the ultrasonic field and the magnetic field. Analysis impactmechanism of the performance and identified the optimum parameters.Firstly, in initially applying ultrasonic experiments, the influence of process parameterson the microhardness indicators turn: current density> ultrasound power> pulse duty cycle.Comprehensive comparison of micro-electroforming magnetic environment optimal processparameters: current density3A/dm2, ultrasonic power240W, pulse duty cycle of20%.Secondly, vertical and parallel of the magnetic field are applied to the ultrasonic elec-tro-deposition. Got the effect of the parallel magnetic field micro-casting electroplatingprocess parameters on grain size indicators: current density> ultrasound power flux density>duty cycle, vertical magnetic field micro-component plating process parameters on grain sizeindicators: current density> ultrasound power> duty cycle> magnetic induction. By compar-ing the experiment found that the current density and the ultrasonic power is still the domi-nant factor in the vertical magnetic field and parallel to the magnetic field experiments andparallel to the magnetic field is stronger than the effect of the vertical magnetic field on theelectro-deposition. In addition, the external magnetic field will also impact the micro castingcoating texture, experimental results show that the magnetic field inhibited the (200) diffrac-tion peak of the electrodeposited and promoted the electrodeposited layer (111) crystal facesgrow preferentially. Comprehensive comparative analysis derived the optimal level of tech-nology portfolio are: Current density2A/dm2, the magnetic flux density the0.6T, parallel tothe magnetic field direction, ultrasonic power300W, pulse duty cycle of20%.Finally, the mathematical model of electro-deposition process under magnetic field isestablished by COMSOL Multiphysics. Coupled and analysis the electromagnetic field andthe flow field by combination of finite element and finite difference method and got the fluid flow field distribution, the distribution of the electric field in the bath and coating thicknessvariation characteristics at different time periods.
Keywords/Search Tags:Magnetic field, Ultrasonic, Multi-field complex role, Micro-electroforming, Experimental study
PDF Full Text Request
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