Preparation And Properties Of Three-dimensional Carbon Nanomaterials

With the development of semiconductor devices, microelectronic package putsforward higher requirements for high density, miniaturization and low cost. Theinterconnection wire as the main channel of current signal and heat flow signal hasbecome an important field of microelectronic packaging development. Compared withcopper wire, the carbon nano material such as one-dimensional carbon nanotube andtwo-dimensional graphene has higher electrical conductivity, thermal conductivity andmechanical strength. Thus, it becomes the ideal material to substitute the metalinterconnection wire.. Based on this starting point, the preparation of carbon nanotube,patterned carbon nanotube array and transfer of carbon nanotube array are discussed andwe also try to prepare three-dimensional carbon nano structure. Besides, the heatdissipation of carbon nanotube array and the current characterization between carbonnanotube and graphene three-dimensional carbon nano structure are also investigated.The detailed contents include four parts as following:1. The iron catalyst film is prepared by the sol-gel method and the carbon nanotubearray is grown by chemical vapor deposition. The photolithography method is used toobtain the patterned iron catalyst film and the patterned carbon nanotube array succeedsgrowing. During the growth of carbon nanotube, the first introduction of hydrogenresults in the preperation of carbon nanotube-multilayer graphite carbon nano structure.2. Because it is difficult to control the preparation of the iron catalyst film by thesol-gel method, in the second section, the floating catalyst-chemical vapor deposition isutilised to synthesis the carbon nanotube array by the pyrolysis of precursor solutioncomposed of xylene and ferrocene(2wt.%). Besides, patterned carbon nanotube array issynthesized, based on the carbon nanotube selective growth for substrate andtemperature resulting in the selective growth. According to the indirect and directtransfer method, the carbon nanotube array is completely transfered on the targetsubstrate.3. The nitrogen doped carbon nanotube array is prepared by the floatingcatalyst-chemical vapor deposition. The precursor solution consists of acetonitrile and ferrocene(2wt.%). The different nitrogen concentrations of carbon nanotubes obtain byadjusting the hydrogen contents. Further, the electrochemical property of nitrogendoped carbon nanotube is characterized by electrochemical workstation.4. The heat dissipation of carbon nanotube is investigated, which indicates carbonnanotube array can significantly improve and reduce the temperature of simulation heatsource. And the electrical property between carbon nanotube and graphene is alsoinvestigated.