Research On Composition And Performance Of Fe-Ga Alloy And Fe-Ga Thin Film

Fe-Ga alloy giant magnetostrictive thin film （GMF） is a new kind of functionalfilm，which is expected to overcome the shortcomings of block Fe-Ga alloy，havemore superior performance than Terfenol-D thin film. Therefore, the study of Fe-GaGMF, has been increasingly brought to the attention of the people. In this paper, fourkinds of Fe_100-xGa_x（x=15,16,17,18） alloys were prepared by vacuum inductionmelting method，research and optimization of the melting process. By magnetronsputtering method for preparing7kinds of films with different thickness. Opticalmicroscope，XRD,Scanning electron microscopy（SEM）,were used to evaluate themicrostructure and property of Fe-Ga alloy and Fe-Ga thin films, Fe-Ga filmformation mechanism was analyzed. Basically have the following result:（1） When using vacuum induction melting furnace melting Fe-Ga alloy,In thesmelting furnace vacuum degree and the strength of current are big to the alloy lossby burning quantity influence,Along with vacuum degree depression,the Fe-Gaalloy loss by burning quantity reduces. In certain scope,along with electric currentenlargement,the Fe-Ga alloy loss by burning quantity increases. In certain scope,when the electric current increases to causes the Fe-Ga alloy the smeltingtemperature surpasses its boiling point,in the Fe-Ga alloy ingredient can volatilize,therefore the electric current size establishment should be suitable;Moreover thequartz tube to the mold distance also can the varying degree influence alloy castingproperty. Through appropriate increase current intensity,reduce the distancebetween the quartz tube and the mold can improve the casting properties of thealloy.（2） Fe_100-xGa_x(the atomic content,（x=15,16,17,18） four kind of alloymicrostructure shape is same,In the alloy has a part of subgrain boundary,in thealloy blackspot is the precipitated phase of Ga. Four kind of Fe-Ga alloy vickershardness along with the alloy in the Ga element content increase,its degree ofhardness more and more is also high.Using spectrometer to Fe₈₃Ga₁₇alloycomposition test results show that the components of Fe-Ga alloy bar obtained byvacuum induction melting is uniform.（3） Different ways of heat treatment can make the Fe-Ga alloys in order anddisorder transition, form different phase, which can change the magnetostriction performance of the alloy.The quenching can make Fe₈₃Ga₁₇magnetostrictive strain ofthe alloy increased. In the cast condition Fe₈₃Ga₁₇alloy microscopic organizationformed the crystal grain big equiaxed grain,after process quenching processing hasformed the dentrite. After the annealing crystal grain shape change is not big， thecrystal grain has certain degree refinement.（4） Using the magnetron sputtering method preparation of Fe-Ga film,Resultsshow that the magnetic control sputtering power of Fe-Ga have influence on thethickness of the film， within the scope of the50w to100w,with the increase ofsputtering power， the thickness of the film also increase,when the power is100w，film reached the maximum thickness of162.16nm. After heat treatment,the Fe-Gafilm organization changed,internal defects decreased, the film becomes more compactand uniform. After heat treatment of the Fe-Ga thin film was measured by vickershardness,found the vickers hardness is related to the power of the magnetron sputtering,within the scope of the50w to100w,with the increase of power,the film hardness alsoshowed a trend of increase,when the power is100w,film hardness peak124N/mm².Magnetron sputtering circular etching assumes the circular ring of target material,through theoretical calculation and analysis, found that the target material utilizationrate is very low.