Research On Key Technologies Of Controllable Mixed Abrasive Fluid Ultra-precision Polishing Equipment

With the development of science and technology, large plane optical glass components over1m in Diagonal length components are in great demand. The conventional optically manufacturing method can’t satisfy the processing efficiency and the machined surface quality requirements.Therefore, studying on new kind of high-efficiency and high-accuracy processing method is in urgent need.Abrasive fluid polishing is a non-contact discrete particle processing method combined with jet theory and elastic launch theory. The high-speed abrasive fluid charges into the clearance between the constraining wheel and optical glass, and a high-energy velocity field has been formed under the centrifugal force of wheel and the hydrodynamic pressure. Abrasive particles can repeatedly impact the workpiece in a multi-directional way in the high-energy zone because an elastic scattering collision have taken place between the constrained wheel and the workpiece, this homogenizing processing can help remove surface material and obtain a smooth surface with higher polishing efficiency. The major research efforts include the following points.1. Based on abrasive fluid polishing theories and elastic emission machining, the paper studied the polishing theories and the hydrodynamic pressure of the polishing zone. And the effect of some main parameters on the material removal efficiency and surface roughness in polishing process is researched.2. An abrasive jet output system is designed through PLC, PCI6221and Labview based on the abrasive jet polishing process characteristics. And a differential type slurry device is manufactured on the basis of the electro-hydraulic control system. The whole system achieves the design function and reaches using standard after Debugging,3. A controllable abrasive fluid polishing device is designed on the basis of General cylindrical grinder and the abrasive fluid output system. The slit nozzle is analyzed through Fluent simulation and a mixing loop device is designed on the basis of hydromechanics, those work help to realize the automation of the mixed abrasive fluid polishing.4. With the discussions above, application experiments for abrasive fluid polishing technology are carried out to analyze the effects of main parameters in finishing to the surface roughness and material removal efficiency. The experiments reveal that controllable mixed abrasive fluid polishing is a promising technique in high precision mirror correcting figure process.