Preparation And Characterization Of Nano-Al/MoO_x Films And Its Application In Energetic SCB

The Al/MoOx multilayer nano-films were prepared by magnetron sputtering technology. The as-deposited Al/MoOx nano-films were characterized by varied analytical techniques, including SEM, AFM, XRD, XPS, DSC and the reaction paths and reaction kinetics of Al/MoOx exothermic reactions were discussed. Results show that the films are smooth and posess excellent adhesion with substrate. The Al films in the Al/MoOx nano-films are cubic system and the MoOx films consisting of MoO3, Mo2O5and MoO2are amorphous. Two distinguishable exothermic peaks can be identified from the DSC traces and the values of heat release are3524J/g.The SCB-Al/MoOx was fabricated using a combination of photolithography, sputtering, and lift-off techniques on a SCB wafer. The NTC thermistors were used to enhance the anti-RF performance of SCB-Al/MoOx. In this paper, the capacitor of47μF was used in open-air electrical explosion tests of SCB-Al/MoOx. Results show that the critical ignition delay and critical ignition energy of SCB-Al/MoOx have no significant difference with SCB. The total energy and the total time of SCB-Al/MoOx have significant difference with SCB due to the impact of heat released by the reaction of Al/MoOx nano-films. Compared with SCB, the input energy utilization rate of SCB-Al/MoOx is less, but the output energy efficiency, the plasma temperature, the flame height and the burning area of SCB-Al/MoOx are higher than SCB. When there is a gap between the flims and the bridge, SCB-Al/MoOx can ignite the self-supporting Al/Ni films reliably but the SCB can’t do this under the same excitation consitions.