| A precision micro machining system with three coupled axles was independently designed and developed because of the need for the machining of high precision small parts. Its size was400mm*400mm*400mm, and Three-axis motion size of150mm*150mm*150mm. The driving mode which was adopted by the machining system contained servo motor, grating ruler and ball screw. The machining system not only realized the closed loop control system, but also, satisfied the high speed, high rigidity and high precision of the precision micro machining system. It built three-dimensional modeling for the machining system by the three-dimensional entity modeling software, which was called CATIA. The main components were analyzed by ANSYS Workbench which was finite element software. It also studied the inherent frequency and vibration mode of the precision micro machining system, and the main components were carried on the optimization for it. It carried out some erperiments in order to detect machining precision and process ability of the precision micro machining system. It through experiments and the analysis of the results to verify the reasonableness of the design. |