Study On Performance And Influencing Factors Of Quartz Pendulous Reed

Being core element of quartz flexure accelerometer, Quartz pendulous reed’s（QPR）displacement decide accelerometer’s range and resolution, and materialstability effects accelerometer’s bias repeatability and scale factor. Size and surfacedamage of Flexure Bridge were studied to improve QPR’s performance.The width of Flexure Bridge was determined by laser cutting. The best parameterof laser cutting (Power,5KHz; Focal length,64mm; Speed,2mm/s; Air compression,0.2MPa.) reduces the width error from0.4mm to0.02mm. However, the length andthickness of Flexure Bridge was decided by acid etching. It is effective to take TwoStep Process to shorten etching time and eliminate damage which formed during acidetching. Moreover, the thickness of Flexure Bridge can be calculated from formulaswhich fitted from test data. Then all kinds of surface damage were classified, and thesurface damage on the flexible bridge cause displacement increasing and naturalfrequency decreasing. It is also found that categories of silica glass effect QPR’sdisplacement and frequency. The elasticity modulus of type Ⅳ silica glassis higherthan type Ⅲ, causing the QPR which made with typeⅢ silica glass owning largerdisplacement even though the size of flexible is same. In addition, because of the Tfoftype Ⅳ silica glassbeing higher than type Ⅲ, the micro-hardness and etching rate oftype Ⅳ is also higher than typeⅢ.The thickness of flexure bridge is the main factor for displacement and naturalfrequency, furthermore material, surface damage and Tfof silica glass are key factorsfor stability of QPR. The results of this study provide methods to increase thedimensional precision and decrease surface damage of flexible bridge, and afford adirection for preparing ascendant silica glass for QPR.