DLC Films Used On Low Emissivity Glass And Study On Properties Of Fluorinated DLC Films

Diamond-like carbon (DLC) films with low friction coefficient, high wearability,chemical inertness and optical transparency, can be used on low emissivity (Low-E)glass. DLC filmshelp improve wear and corrosion resistance of Low-E glass, andreduce scratches and wear caused during the process of transportation and coldworking. In this paper, plasma-enhanced chemical vapor deposition method was usedto deposite DLCfilmson off-line single silver Low-E glass. The results showed that,DLC filmswith thickness of10~12nmcould effectively reduce friction coefficient ofLow-E glass, improve the wearability, and protect the original film structure. DLCfilms can effectivelyprotect Low-E glass and delay their hydrochloric acid corrosion.DLC films could be effectively removedfrom Low-E glass by tempering，and aftertemperinglow radiation properties and optical properties were not affected.Due to the property of low surface energy, fluorinated diamond-like carbon(F-DLC) films havethe property of hydrophobicity, and can be used on glass to makeit easy toclean. Plasma enhanced chemical vapor deposition method was used toprepare F-DLC filmson glass substrate. Two ways to modify DLC withfluorine, i.e.,deposition from hydrocarbon-fluorocarbon gas mixtures (fluorine doping) and surfacefluorination, were used respectively. Water contact angle,bond type,surfacemorphology and roughness and friction and wear properties were discussed by contactangle measurement, X-ray photoelectron spectroscopy, Raman spectroscopy, atomicforce microscopy, and friction and wear tester.The results showed that, F could enhance the hydrophobic property, and thewater contact angle could reach103°.Water contact angle increased with the increaseof the fluorine content in the film. Taken the surface roughness into consideration,fluorine content, especiallythe hydrophobic group-CF2were the main factoraffectingthe water contact angle. With the increase of fluorine content in theF-DLC film,sp3/sp2ratioreduced accordingly, therefore carbon-carbon sp3content reduced.Compared with DLC films, the friction coefficient of F-DLC filmsprepared byfluorine doping and surface fluorination increased. F-DLC film is still showingwearability of some compared to the glass, but wearability droppedcompared to theDLC films.