Research On The Processing And Error Compensation Technology Of Silicon Aspheric Lens

With the rapid development of modern optical technology,the demand of optical components in the field of defense, industrial and commercial is increasing,and the manufacturing precision is improving continuously.If aspherical components are applied to optical system, the aberration can be eliminated,the dispersion can be reduced,the system can be simplified,the cost and weight can be reduced, and high performance design capabilities of the system can be improved. Along with the continuously improvement of product quality and diversification requirements, Aspheric ultra-precision processing is facing more strict and complicated challenges.In the infrared optical system, the requirements of surface quality and surface accuracy of the silicon lens are very strict. CNC milling and CNC polishing are still the focus of modern aspherical processing technology in contemporary. The topic studied the CNC milling and polishing techniques of the infrared silicon lens mainly. To research the technology that affect the surface precision from the perspective of quality, accuracy and efficiency.Through the use of Germany Schneider GI-3P high precisionCNC milling machine, the topic studied the influence factors of surface precision milling machining parts. To analys the influence of the surface roughness on the parameters of the grinding wheel, grinding parameters and coolant, and other factors respectively, to explore the influence law on the factors of the surface roughness by single factor experiment method. Furthermore, the milling of aspherical surface shape error compensation technology is also studied, it mainly analysed the Z-axis offset error, the offset error of the CNC program origin and the actual workpiece rotation axis and the grinding wheel wear error. And studied the reasonable compensation method to improve the accuracy of aspherical surface shape. At last,arrange the process test,to optimize the parameters affecting the aspheric surface roughness in the milling process,to research significant degree of influence factors.By combining with process test, to analyse the method of improving the CNC polishing aspheric surface roughness and form accuracy.Using single factor method, it studied the influence law which is aspheric surface roughness effected by polished mold material, polished die speed, airbag amount of compression and polishing concentration and other factors. Used the new Germany LOH-data-correct milling software, compensated the polished surface shape, toimprove the efficiency of polishing, to optimize aspheric polishing process. Compared with the traditional polishing surface shape compensation, applying this software CNC aspheric polishing certainty has greatly improved.Aspherical surface shape measuring technology is one of the main factors that restrict aspheric machining accuracy improving.Aspheric ultra-precision machining is difficult to achieve, if no high precision techniques for the surface profile measuring of aspheric. By modeling for working principle ofstylus profilometer,to analyzed the influence of the detecting error to accuracy of aspherical surface shape. According to the working principle of the non-contact detection method, it further analysed the error introduced by the analytical system, studied the reasonable error compensation, so as to improve the manufacturing precision of ultra-precision aspheric surface.