Research Of Test And Experiment Of Ohmic RF-MEMS Switch

RF(Radio Frequency)-MEMS(Micro-electro-mechanical Systems) switch is the productof technological development on electronics and mechanical precision machining.Compared with electronic switch, RF-MEMS switch’s great advantages involve RFproperty, power comsumpation and volume. It has large potential of application tomicrowave phase shifter, reconfigurable antenna, satellite communication and radar.Fristly, this paper describes the recent research on RF-MEMS switch at home andaboard. Now the study of RF-MEMS switch focuses on simulation, design andprocessing technology. Switch test focuses on test results in order to verity the effects ofdesign and improvement. During the measurement, it has not been given enoughconcern that test conditions and environment influence test results. So this project’sresearch aim is presented.According to the excited testing methods, this subject conducts research ofmeasurement and experiment of ohmic RF-MEMS switch. Techonological parametersof MEMS switch are analysized and mathematical model is established. Then theirinteraction is studied. Pull-in voltage, closing and release time, testing mothod of RFparameter and parameter change versus temperature are focused in the paper.Various testing method of mechanical and electrical parameters, RF parameters ofohmic RF-MEMS switch are discussed in detail. Comparing technical specifications ofohmic switch and tesing results, feasibility of testing progame is studied. Throughcomparison and analysis of results, variasion of switch parameter versus testingconsidition is obtained. Experiments show that testing programs are right. They meetthe needs of parameter testing of ohmic RF-MEMS switch. By means of analysis of testresults, different testing conditions’ influences on test results are obtained.In order to get temperature characteristics, switch is measured at various temperatures.The properity of switch’s beam are changing when the temperature rise. This kind ofvariety is reflected in modulus of elasticity. Temperature can impact technicalspecifications of switch.Finally, testing methods of ohmic RF-MEMS switch are finished in this paper.According to the change of test conditions, variation of technical specifications is obtained. These researches will accelerate the technological development of ohmicRF-MEMS switch.