Position Measurement And Control Of The Precision Active Isolation

The rapid development of precision manufacturing industry has put forward higher andhigher demand for manufacturing equipment. For precision manufacturing equipment, therequirements of working environment are very important. Precision active vibration isolator isable to reduce the influence of outside vibration on precision equipment, thus upgrading itsworking environment. Position measurement plays an important role in active vibrationisolation control system. It is an important part of active vibration isolator and one of the keylinks to realize closed loop active control.This thesis analyzed the importance of precision measurement and control system fromthe control requirements of active vibration isolator and its working principle. The designscheme of position measurement and control system was put forward and the type ofdisplacement sensor was selected according to the requirements of position measurement ofthe vibration isolator. The mechanical structure design on the installation and adjustment ofthe displacement sensor in active vibration isolation system was completed. The signalconditioning circuit of the sensors was designed. The pneumatic control loop of positioncontrol and the control circuit of pneumatic valves were designed according to the designscheme of the position control system. The position measurement of active vibration isolatorand control system software was designed on the basis of the design scheme that was putforward and the hardware of the pneumatic position control loop.The calibration experiment was conducted after the completion of hardware and softwaredesign of the position measurement part and the control system. The linear calibrationequation of the control system scheme was determined through analysis of test data. Theinfluence of the measured metal conductor material on the sensitivity of eddy current sensorwas analysised and provided a reference for later design and experiments.