Study On Motion Control Of H-type Stage Driven By Dual Linear Motors

Silicon Wafer stage is one of the key subsystem of IC manufacturing equipment suchas lithography, The mainstream structure of silicon wafer Stage always use H typelayout, so research on the H-type precision motion platform has very importantsignificance, This thesis mainly researches on motion control problems of H-typeprecesion motion platform.Firstly, the thesis describes the structural characteristics of the dual linear motordriven H-type precision motion platform, clarify the basic control framework of theH-type motion platform, simplifies the mechanical model of the platform, and establishesaccurate dynamic model for the motion platform using Matlab/Simulink/SimMechanics,Analyzes the movement characteristics and difficulties in control system.According to the performance requirement such as high speed, micro-feed and lowdamping, the controller is consisted of lead compensation and IP peed controller, speedand acceleration feed-forward controller are designed to reduce the tracing error, and aspeed observation model is found to eliminate the effects of disturbance force.On the basis of these studies, the thesis analyses the case of the synchronization errorof dual linear motor position servo system; designs the feed-forward controller based onthe displacement and acceleration to predict the fluctuation of the load, which greatlyreduces the synchronization error, design the fuzzy feedback compensation controller todecrease the sensitivity of the retardation time of displacement feedforward, reduces thesynchronization error furtherly.Using Simulink and SimMechanics Co-simulation system can reflect the state of thereal movement system, motion state of different signals can be observed using the simulation system, the control method which combine displacement feedforward andfuzzy feedback can reduce the synchronous error effectively.