Reserch On Macro-micro Drive Stage And Laser Interferometry For Cross-scale Surface Measurement

Since the Scanning Tunneling Microscopy(STM) was developed in the early1980s, a series of scanning probe microscopies(SPM) came up and human beingsstarted to explore the field of micro. However, those measuring instruments havesome disadvantages like the measuring range is too small and measurement can’ttrace to meter. The Molecular Measuring Machine is designed by the NationalInstitute of Standards and Technology to meet the measuring requirements. Itsdesign goal is to limit the measurement uncertainty to1nm and keep themeasurement resolution to0.1nm in the measuring range of50mm×50mm×100μm.In this paper, we do some research on macro-micro drive stage and laserinterferometry for cross-scale surface measurement based on the MolecularMeasuring Machine. At first, we design a motion stage which is the combinationmacro motion guide and micro motion platform. Then we use the finite elementsoftware to analyze the design results. After the introduction of motion stage, thispaper presents a measurement system based on laser interferometry technology.The measurement system consists of a collimated beam expander path and acoupled differential optical path. We use ZEMAX for simulation analysis on themeasurement optical path. The paper then presents some research on the errorcaused by the non-ideal optical performance and deflection of the opticsinstallation. Finally, we establish the interference signal error model based on theanalysis of interferometry principle. The Heydemann error compensationalgorithm is studied and we use MATLAB to analyze the algorithm. All the resultsof simulation show that the design of the macro-micro drive stage and the laserinterferometry system is feasible and exhibits good performance.